The paper presents a method for accurate imaging of three-dimensional surface topography, through correction of the vertical drift. The method can be applied to any scanner system. True surface topography is calculated based on two images taken mutually orthogonal with scanning directions. Topography calculation is done automatically, by own developed software. A preliminary investigation was carried out, involving tests on software gauges and profiling on a spherical surface. The potential of the method was proved and improvements in radius of curvature evaluation are presented.
True three-dimensional surface topography imaging with AFM
MARINELLO, FRANCESCO;
2005
Abstract
The paper presents a method for accurate imaging of three-dimensional surface topography, through correction of the vertical drift. The method can be applied to any scanner system. True surface topography is calculated based on two images taken mutually orthogonal with scanning directions. Topography calculation is done automatically, by own developed software. A preliminary investigation was carried out, involving tests on software gauges and profiling on a spherical surface. The potential of the method was proved and improvements in radius of curvature evaluation are presented.File in questo prodotto:
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