This paper presents an approach, improving instrumental performance, with regard to the limitation on γ (maximum detectable slope). This is based on the use of an optical 3D profiler, a closed-loop single axis tilt stage and software routine, coded on purpose, within commercially available image processing software.
Increase of maximum detectable slope with optical profilers, through controlled tilting and image processing
MARINELLO, FRANCESCO;
2006
Abstract
This paper presents an approach, improving instrumental performance, with regard to the limitation on γ (maximum detectable slope). This is based on the use of an optical 3D profiler, a closed-loop single axis tilt stage and software routine, coded on purpose, within commercially available image processing software.
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