Push-Pull electrostatic deformable mirrors

Deformable membrane mirrors have a lot of advantages if compared with other adaptive optics devices such as bimorph mirrors, liquid crystal modulators, and thermal mirrors. Their properties are good optical power, low cost, limited power consumption, achromaticity and a good dynamic behavior. Their use in technological applications is limited by the quite low spatial resolution and maximum stroke. We propose two different configurations of push-pull membrane mirrors which improve typical performances. Both these mirrors have the advantage of having electrodes on both side of the membrane. The top side electrodes are conductive and transparent. We present a first device with a single transparent electrode on the top side and a second device with electrodes transparent pattern in the top side active region. The advantages compared to the state of the art technique for electrostatic mirror are measured and presented.