Dielectric breakdown of the insulator between suspended membrane and actuation layer under anchorages can lead to a new stiction mechanism on electrostatically actuated RF-MEMS switches. Actuator current is investigated as an indicator of stiction issues and charge trapping phenomena. A design guide-line to improve RFMEMS switches reliability is also furnished
Stiction Induced by Dielectric Breakdown on rf-MEMS Switches
TAZZOLI, AUGUSTO;AUTIZI, ENRICO;PERETTI, VANNI;MENEGHESSO, GAUDENZIO
2008
Abstract
Dielectric breakdown of the insulator between suspended membrane and actuation layer under anchorages can lead to a new stiction mechanism on electrostatically actuated RF-MEMS switches. Actuator current is investigated as an indicator of stiction issues and charge trapping phenomena. A design guide-line to improve RFMEMS switches reliability is also furnishedFile in questo prodotto:
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