Micro-Nano integrated manufacturing metrology for the characterization of micro injection moulded parts

Micro injection moulding is a key technology which enables the mass fabrication of polymer based micro components. Micro moulded parts can be regarded as parts with a weight in the order of milligrams, parts with at least one dimension in the micro meter range, and parts with overall conventional dimensions presenting micro features [1]. The characterization of such parts brings challenges in terms of measurements because of the integrated multi-scale dimensional range of the features to be controlled: macro and micro scale devices, micro scaled features, details in the nano-dimensional range. Furthermore, three-dimensional measuring capabilities are required, along with sub-micrometer or even nanometre accuracy. Experimental results clearly show the critical role of the metrology instrumentation in this range. In particular, the ability of carrying out three-dimensional measurements with micrometre or sub-micrometre uncertainties is critical if micro injection moulding capabilities have to be investigated.