High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the devel- opment of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.

Structural and compositional characterization of X-cut LiNbO3 crystals implanted with high energy oxygen and carbon ions

SADA, CINZIA;ARGIOLAS, NICOLA;BAZZAN, MARCO;MAZZOLDI, PAOLO;
2005

Abstract

High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the devel- opment of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11577/2449556
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