In the present work a combined sol-gel/CVD approach was employed for the preparation of mixed CeO2/ZrO2 nanosystems by the PA-CVD (Plasma-Assisted CVD) deposition of ceria on a zirconia xerogel. Film preparation was accomplished from Zr(OBut)4 and Ce(dpm)4 for the sol-gel and PA-CVD processes respectively. The coatings were subsequently annealed in air in order to investigate the thermal treatment influence on their chemico-physical properties. The composition of the films and their behaviour toward crystallization were studied by X-ray Photoelectron Spectroscopy (XPS) and Glancing-Incidence X-ray Diffraction (GIXRD), while their surface morphology was analyzed by Atomic Force Microscopy (AFM). Pure layers with nanocrystalline ZrO2 and variable Ce(IV)/Ce(III) ratio as a function of processing conditions were obtained.
Nanoscale CeO2-ZrO2 thin films: a combined approach by CVD and sol-gel routes
L. ARMELAO;GASPAROTTO, ALBERTO;TONDELLO, EUGENIO
2003
Abstract
In the present work a combined sol-gel/CVD approach was employed for the preparation of mixed CeO2/ZrO2 nanosystems by the PA-CVD (Plasma-Assisted CVD) deposition of ceria on a zirconia xerogel. Film preparation was accomplished from Zr(OBut)4 and Ce(dpm)4 for the sol-gel and PA-CVD processes respectively. The coatings were subsequently annealed in air in order to investigate the thermal treatment influence on their chemico-physical properties. The composition of the films and their behaviour toward crystallization were studied by X-ray Photoelectron Spectroscopy (XPS) and Glancing-Incidence X-ray Diffraction (GIXRD), while their surface morphology was analyzed by Atomic Force Microscopy (AFM). Pure layers with nanocrystalline ZrO2 and variable Ce(IV)/Ce(III) ratio as a function of processing conditions were obtained.
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