The paper reviews optical techniques for the characterization and failure analysis of electron devices and integrated circuits based on scanning laser confocal microscopy, optical beam induced current (OBIC), and on infrared thermomicrography and emission microscopy. Several examples related to Si and GaAs devices are presented.
Tecniche di caratterizzazione e analisi di guasto di dispositivi elettronici mediante microscopia a scansione laser e microscopia a infrarossi
ZANONI, ENRICO
1990
Abstract
The paper reviews optical techniques for the characterization and failure analysis of electron devices and integrated circuits based on scanning laser confocal microscopy, optical beam induced current (OBIC), and on infrared thermomicrography and emission microscopy. Several examples related to Si and GaAs devices are presented.File in questo prodotto:
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