Due to the delicate structures of a micromachined component, the analysis of machining errors is a difficult task. However, in order to optimize the machining outcome, it is necessary to identify the source of the errors. By using a CT measurement of the machined workpiece in combination with a process simulation, it is possible to analyse deviations from the target geometry and the machining process in detail so that the causes for the deviations can be determined and resolved. An exemplary procedure for a micromachined test workpiece is presented in this paper.

Analysing Machining Errors Resulting from a Micromilling Process using CT Measurement and Process Simulation

CARMIGNATO, SIMONE;ZANINI, FILIPPO;
2015

Abstract

Due to the delicate structures of a micromachined component, the analysis of machining errors is a difficult task. However, in order to optimize the machining outcome, it is necessary to identify the source of the errors. By using a CT measurement of the machined workpiece in combination with a process simulation, it is possible to analyse deviations from the target geometry and the machining process in detail so that the causes for the deviations can be determined and resolved. An exemplary procedure for a micromachined test workpiece is presented in this paper.
Proceedings of the 4M/ICOMM2015 Conference
978-981-09-4609-8
978-981-09-4609-8
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11577/3190077
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