Analysis of the damage effect of femtosecond-laser irradiation on EUV Mo/Si multilayer coating

Damage analysis of Mo/Si multilayer coatings exposed to fs infrared laser irradiation has been performed. The Mo/Si a-periodic multilayer samples were specifically designed with wide reflectivity bandwidth and suitable phase chirp in order to reflect attosecond pulses. After irradiation, the mirror surfacewas analyzed by using an optical microscope and a profilometer. The stoichiometry of the compounds formed at the sample surface after the irradiation was investigated using X-Ray photoemission spectroscopy. The performances of the irradiated sampleswith the reflected pulse characteristics have been derived via reflectivity and phase measurements.