An insight into the benefits and challenges of FinFET based multi-gate devices is presented. The roles of the device geometry and the three-dimensional architecture are investigated
Multi-gate devices for the 32-nm node and beyond: advantages and issues
GRIFFONI, ALESSIO;PACCAGNELLA, ALESSANDRO;MENEGHESSO, GAUDENZIO
2008
Abstract
An insight into the benefits and challenges of FinFET based multi-gate devices is presented. The roles of the device geometry and the three-dimensional architecture are investigatedFile in questo prodotto:
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