This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based on parallel-plate capacitors. The compensating signal is generated and calibrated according to the nominal quadrature error to reject, and is injected into the system by means of a compensation circuit based on a dynamically reconfigurable capacitor bank. The compensation scheme described in the paper has been implemented on ASIC and experimentally tested on a real MEMS vibratory gyroscope. Experimental results show that the proposed solution assures good rejection capabilities, even for very large quadrature errors that unavoidably saturates the sensor readout interface.
Open loop Compensation of the Quadrature Error in MEMS Vibrating Gyroscopes
OBOE, ROBERTO;
2009
Abstract
This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based on parallel-plate capacitors. The compensating signal is generated and calibrated according to the nominal quadrature error to reject, and is injected into the system by means of a compensation circuit based on a dynamically reconfigurable capacitor bank. The compensation scheme described in the paper has been implemented on ASIC and experimentally tested on a real MEMS vibratory gyroscope. Experimental results show that the proposed solution assures good rejection capabilities, even for very large quadrature errors that unavoidably saturates the sensor readout interface.Pubblicazioni consigliate
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