An on-wafer human metal model ESD measurement setup with voltage and current waveform measurement capability is presented. Using this setup, typical ESD protection structures and ESD protected circuits are characterized. A correlation between device responses on system-level ESD compared to component-level ESD stress like human body model is found to depend strongly on the device type.
On-Wafer Human Metal Model Measurements for System-Level ESD Analysis on Component Level
GRIFFONI, ALESSIO;MENEGHESSO, GAUDENZIO;
2009
Abstract
An on-wafer human metal model ESD measurement setup with voltage and current waveform measurement capability is presented. Using this setup, typical ESD protection structures and ESD protected circuits are characterized. A correlation between device responses on system-level ESD compared to component-level ESD stress like human body model is found to depend strongly on the device type.File in questo prodotto:
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