Plasma-enhanced chemical vapor deposition of vanadium pentoxide thin films from a vanadyl(IV) beta-diketonate compound has been performed in a low-pressure reactor under different operating conditions. The effect of various parameters, such as the: flow rates of the carrier and reactive gas and the substrate temperatures, on films composition, microstructure, and morphology was investigated in detail. Controlled variations of the synthesis conditions allowed a fine modulation of the sample properties, as shown by XRD and AFM analyses. In particular, at 200 degrees C and moderate oxygen flow, nanophasic V2O5 with a strong (001) preferential orientation could be easily obtained. The composition and purity of the films are studied by XPS and SIMS analyses, with special regard to film-substrate interdiffusion phenomena. Optical properties of the films are also investigated.

Highly oriented V2O5 nanocrystalline thin films by plasma-enhanced chemical vapor deposition

BARRECA, DAVIDE;ARMELAO, LIDIA;DI NOTO, VITO;RIZZI, GIAN-ANDREA;TONDELLO, EUGENIO
2000

Abstract

Plasma-enhanced chemical vapor deposition of vanadium pentoxide thin films from a vanadyl(IV) beta-diketonate compound has been performed in a low-pressure reactor under different operating conditions. The effect of various parameters, such as the: flow rates of the carrier and reactive gas and the substrate temperatures, on films composition, microstructure, and morphology was investigated in detail. Controlled variations of the synthesis conditions allowed a fine modulation of the sample properties, as shown by XRD and AFM analyses. In particular, at 200 degrees C and moderate oxygen flow, nanophasic V2O5 with a strong (001) preferential orientation could be easily obtained. The composition and purity of the films are studied by XPS and SIMS analyses, with special regard to film-substrate interdiffusion phenomena. Optical properties of the films are also investigated.
File in questo prodotto:
Non ci sono file associati a questo prodotto.
Pubblicazioni consigliate

Caricamento pubblicazioni consigliate

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11577/2429065
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 63
  • ???jsp.display-item.citation.isi??? 60
social impact