Iron ions were implanted with a total fluence of 6 x 10^17 ions/m^2 into lithium niobate crystals by way of a sequential implantation at different energies of 95, 100 and 105 MeV respectively through an energy retarder Fe foil to get a uniform Fe doping of about few microns from the surface. The implanted crystals were then annealed in air in the range 200–400 °C for different durations to promote the crystalline quality that was damaged by implantation. In order to understand the basic phenomena underlying the implantation process, compositional in-depth profiles obtained by the secondary ion mass spectrometry were correlated to the structural properties of the implanted region measured by the high resolution X- ray diffraction depending on the process parameters. The optimised preparation conditions are outlined in order to recover the crystalline quality, essential for integrated photorefractive applications.

Structural and compositional characterization of LiNbO3 crystals implanted with high energy iron ions

SADA, CINZIA;ARGIOLAS, NICOLA;BAZZAN, MARCO;ZALTRON, ANNAMARIA;MAZZOLDI, PAOLO;
2010

Abstract

Iron ions were implanted with a total fluence of 6 x 10^17 ions/m^2 into lithium niobate crystals by way of a sequential implantation at different energies of 95, 100 and 105 MeV respectively through an energy retarder Fe foil to get a uniform Fe doping of about few microns from the surface. The implanted crystals were then annealed in air in the range 200–400 °C for different durations to promote the crystalline quality that was damaged by implantation. In order to understand the basic phenomena underlying the implantation process, compositional in-depth profiles obtained by the secondary ion mass spectrometry were correlated to the structural properties of the implanted region measured by the high resolution X- ray diffraction depending on the process parameters. The optimised preparation conditions are outlined in order to recover the crystalline quality, essential for integrated photorefractive applications.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11577/2432451
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