Testing of x-ray microtomography systems using a traceable geometrical standard

X-ray computed microtomography is an interesting imaging technique for many applications, and is also very promising in the field of coordinate metrology at the micro scale. The main advantage with respect to traditional tactile-probing or optical coordinate measurement systems is that x-ray tomography can acquire dimensional and geometrical data for both inner and outer surfaces, without accessibility restrictions. However, there are no accepted test procedures available so far and measurement uncertainty is unknown in many cases, due to complex and numerous error sources. The paper presents the first results of a test procedure implemented for determining the errors of indication for length measurements of x-ray microtomography systems, using a new reference standard featuring a regular array of inner and outer cylindrical shapes. The developed test method allows the determination of specific characteristics of x-ray microtomography systems and can be used for the correction of systematic errors.