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EnglishHigh energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the devel- opment of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.
| Titolo: | Structural and compositional characterization of X-cut LiNbO3 crystals implanted with high energy oxygen and carbon ions |
| Autori: | |
| Data di pubblicazione: | 2005 |
| Rivista: | |
| Abstract: | High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the devel- opment of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect. |
| Handle: | http://hdl.handle.net/11577/2449556 |
| Appare nelle tipologie: | 01.01 - Articolo in rivista |
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