Structural and compositional characterization of X-cut LiNbO3 crystals implanted with high energy oxygen and carbon ions

Bentini, Gg; Bianconi, M; Cerutti, A; Chiarini, M; Pennestri, G; Sada, Cinzia; Argiolas, Nicola; Bazzan, Marco; Mazzoldi, Paolo; Guzzi, R.

doi:10.1016/j.nimb.2005.06.110

High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the devel- opment of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.

Titolo:	Structural and compositional characterization of X-cut LiNbO3 crystals implanted with high energy oxygen and carbon ions
Autori:	BENTINI GG BIANCONI M CERUTTI A CHIARINI M PENNESTRI G SADA, CINZIA ARGIOLAS, NICOLA BAZZAN, MARCO MAZZOLDI, PAOLO GUZZI R. mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2005
Rivista:	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Abstract:	High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the devel- opment of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.
Handle:	http://hdl.handle.net/11577/2449556
Appare nelle tipologie:	01.01 - Articolo in rivista

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