Two magnetron sputtering devices have been numerically analyzed and the results have been experimentally validated. For the first device it has been inferred that a ferromagnetic yoke is not present, while the second one has a ferromagnetic yoke. It is shown numerically that either the adding of the yoke, in the first case, or the removal of the yoke, in the second one, has limited effects in the magnetic configuration over the cathode. The same result has been obtained with a dummy case study, where a parametric analysis for considering devices with different sizes, with and without yoke, has been performed.

Equivalent model of a magnetron sputtering device with ferromagnetic yoke

DESIDERI, DANIELE;MASCHIO, ALVISE;
2012

Abstract

Two magnetron sputtering devices have been numerically analyzed and the results have been experimentally validated. For the first device it has been inferred that a ferromagnetic yoke is not present, while the second one has a ferromagnetic yoke. It is shown numerically that either the adding of the yoke, in the first case, or the removal of the yoke, in the second one, has limited effects in the magnetic configuration over the cathode. The same result has been obtained with a dummy case study, where a parametric analysis for considering devices with different sizes, with and without yoke, has been performed.
2012
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11577/2479864
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