Fabrication of metamaterials in the optical spectral range

Garoli, Denis; Natali, M.; Parisi, Giuseppe; Ongarello, Tommaso; Sovernigo, E.; Massari, M.; Giorgis, V.; Ruffato, Gianluca; De Zuani, S.; Romanato, Filippo

doi:10.1016/j.mee.2010.12.085

Recently, the fabrication and optimization of nano-hole arrays in multi-layers has attracted much attention for their interesting applications in nano-optics and biosensing. In particular nano-hole arrays in metal-dielectric-metal stacks, also known as "fish-net" type structures, actually are the best candidates to accomplish some suggestive physical phenomena like negative refractive index, super-lensing and invisibility cloaks in the optical spectral range. Here, we report our preliminary results on the nanofabrication of "fish-net" type Au/dielectric/Au metamaterial stacks. Nano-hole arrays have been realized on Au (30 nm)-dielectric (50 nm)-Au (30 nm)/ITO stacks by means of direct ion milling with FIB using a FEI Nova 600i instrument. Finite element method (FEM) simulations were used to design the structures and to foresee their optical behavior. (C) 2010 Elsevier B.V. All rights reserved.

Titolo:	Fabrication of metamaterials in the optical spectral range
Autori:	GAROLI, DENIS M. Natali PARISI, GIUSEPPE ONGARELLO, TOMMASO E. Sovernigo M. Massari V. Giorgis RUFFATO, GIANLUCA S. De Zuani ROMANATO, FILIPPO mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2011
Rivista:	MICROELECTRONIC ENGINEERING
Abstract:	Recently, the fabrication and optimization of nano-hole arrays in multi-layers has attracted much attention for their interesting applications in nano-optics and biosensing. In particular nano-hole arrays in metal-dielectric-metal stacks, also known as "fish-net" type structures, actually are the best candidates to accomplish some suggestive physical phenomena like negative refractive index, super-lensing and invisibility cloaks in the optical spectral range. Here, we report our preliminary results on the nanofabrication of "fish-net" type Au/dielectric/Au metamaterial stacks. Nano-hole arrays have been realized on Au (30 nm)-dielectric (50 nm)-Au (30 nm)/ITO stacks by means of direct ion milling with FIB using a FEI Nova 600i instrument. Finite element method (FEM) simulations were used to design the structures and to foresee their optical behavior. (C) 2010 Elsevier B.V. All rights reserved.
Handle:	http://hdl.handle.net/11577/2486132
Appare nelle tipologie:	01.01 - Articolo in rivista

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