Characterization of the ion beam mixed Fe/SiO2 interface by M?ssbauer spectroscopy

Mixing induced by 100 keV Ar+ irradiation and subsequent thermally induced transformations have been studied in the Fe/SiO2 system by means of conversion electron MÖssbauer spectroscopy and Rutherford backscattering spectrometry. Several Fe-phases are formed in the mixed region of the Fe/SiO2 interface: metallic Fe in the form of small clusters, an oxide and a silicate phase. Fe-silicate is the dominant phase at Ar+ fluences of 2.5 and 5 × 1016 ons/cm2, whereas metallic clusters become the dominant phase at the Ar+ fluence of 1017 ions/cm2. Annealing at temperatures of up to 500 ° C produce some changes of the Fe areal density of each Fe-phase. At 700 ° C a noticeable precipitation of α-Fe occurs, which becomes the predominant phase in the sample irradiated at the Ar+ fluence of 1017 ions/cm2. © 1987.