Fe2O3 nanostructures are fabricated on Si(100) and SiO2 by plasma enhanced (PE)CVD from a FeIII b-diketonate precursor. Depositions are carried out in Ar-O2 plasmas,devoting particula rattention to the influence of growth temperature (from 60 to 400 C) on material chemico-physical properties. Remarkably, high purity, single-phase a-Fe2O3 nanostructures are obtained attemperaturesaslowas608C.Furthermore,thedeposit nano-organization can be tuned from<110>-oriented 2D nanoblade arrays to denser nanocolumns upon increasing the deposition temperature.A possible growth model is proposed to account for the observed structural/morphological features and light absorption properties of the target materials.
PECVD of hematite nanoblades and nanocolumns: synthesis, characterization and growth model; 2015
CARRARO, GIORGIO;GASPAROTTO, ALBERTO;MACCATO, CHIARA;
2015
Abstract
Fe2O3 nanostructures are fabricated on Si(100) and SiO2 by plasma enhanced (PE)CVD from a FeIII b-diketonate precursor. Depositions are carried out in Ar-O2 plasmas,devoting particula rattention to the influence of growth temperature (from 60 to 400 C) on material chemico-physical properties. Remarkably, high purity, single-phase a-Fe2O3 nanostructures are obtained attemperaturesaslowas608C.Furthermore,thedeposit nano-organization can be tuned from<110>-oriented 2D nanoblade arrays to denser nanocolumns upon increasing the deposition temperature.A possible growth model is proposed to account for the observed structural/morphological features and light absorption properties of the target materials.Pubblicazioni consigliate
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