This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based on parallel-plate capacitors. The compensating signal is generated and calibrated according to the nominal quadrature error to reject, and is injected into the system by means of a compensation circuit based on a dynamically reconfigurable capacitor bank. The compensation scheme described in the paper has been implemented on ASIC and experimentally tested on a real MEMS vibratory gyroscope. Experimental results show that the proposed solution assures good rejection capabilities, even for very large quadrature errors that unavoidably saturates the sensor readout interface. ©2009 IEEE.

Open loop compensation of the quadrature error in MEMS vibrating gyroscopes

Antonello R.;Oboe R.;
2009

Abstract

This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based on parallel-plate capacitors. The compensating signal is generated and calibrated according to the nominal quadrature error to reject, and is injected into the system by means of a compensation circuit based on a dynamically reconfigurable capacitor bank. The compensation scheme described in the paper has been implemented on ASIC and experimentally tested on a real MEMS vibratory gyroscope. Experimental results show that the proposed solution assures good rejection capabilities, even for very large quadrature errors that unavoidably saturates the sensor readout interface. ©2009 IEEE.
Proceedings of the 35th Annual Conference of IEEE Industrial Electronics
9781424446483
9781424446490
9781424446506
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11577/3331114
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