The temperature distribution and thermal deformation of optics subject to heat load largely depend on the system geometry. It is possible to optimize this geometry and therefore to minimize thermal distortion of both white beam mirrors and multilayer-based optics. The thermal slope error in an optimized water-cooled white beam mirror can be reduced by two to three orders of magnitude compared to a non-optimized mirror. © 2013 IOP Publishing Ltd.
Thermal distortion minimization by geometry optimization for water-cooled white beam mirror or multilayer optics
Monaco, Giulio;
2013
Abstract
The temperature distribution and thermal deformation of optics subject to heat load largely depend on the system geometry. It is possible to optimize this geometry and therefore to minimize thermal distortion of both white beam mirrors and multilayer-based optics. The thermal slope error in an optimized water-cooled white beam mirror can be reduced by two to three orders of magnitude compared to a non-optimized mirror. © 2013 IOP Publishing Ltd.
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