The present invention concerns a susceptor comprising a disc-shaped portion (21) and a cylindrical or conical portion (22); the disc-shaped portion (21) is used to (directly or indirectly) support one or more substrates to be subjected to epitaxial deposition inside a reaction chamber of an epitaxial deposition reactor; the cylindrical or conical portion (22) is used to contribute to the heating of the disc-shaped portion (21); thanks to the configuration of the susceptor, it is possible to heat the disc-shaped portion (21) to a very uniform temperature; in fact, for example, the heating of the susceptor can be obtained through a first inductor (4) adapted to directly heat the disc-shaped portion (21), in particular its outer annular zone, and a second inductor (5) adapted to directly heat the cylindrical or conical portion (22) and indirectly heat the disc-shaped portion (21), in particular its central zone.

Inductively heatable susceptor and epitaxial deposition reactor

Michele Forzan;
2017

Abstract

The present invention concerns a susceptor comprising a disc-shaped portion (21) and a cylindrical or conical portion (22); the disc-shaped portion (21) is used to (directly or indirectly) support one or more substrates to be subjected to epitaxial deposition inside a reaction chamber of an epitaxial deposition reactor; the cylindrical or conical portion (22) is used to contribute to the heating of the disc-shaped portion (21); thanks to the configuration of the susceptor, it is possible to heat the disc-shaped portion (21) to a very uniform temperature; in fact, for example, the heating of the susceptor can be obtained through a first inductor (4) adapted to directly heat the disc-shaped portion (21), in particular its outer annular zone, and a second inductor (5) adapted to directly heat the cylindrical or conical portion (22) and indirectly heat the disc-shaped portion (21), in particular its central zone.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11577/3439622
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