In this work we present the design of a Pd/B4C multilayer structure optimized for high reflectance at 6.67 nm. The structure has been deposited and also characterized along one year in order to investigate itstemporal stability. This coating has been developed for the beam transport system of FERMI@Elettra Free Electron Laser: the use of an additional aperiodic capping layer on top of the structure combines the high reflectance with filter properties useful in rejecting the fundamental harmonic when the goal is to select the third FEL harmonic. ©2012 Optical Society of America.
Extreme ultraviolet multilayer for the FERMI@Elettra free electron laser beam transport system
Corso AJ;Zuppella P;Pelizzo MG
2012
Abstract
In this work we present the design of a Pd/B4C multilayer structure optimized for high reflectance at 6.67 nm. The structure has been deposited and also characterized along one year in order to investigate itstemporal stability. This coating has been developed for the beam transport system of FERMI@Elettra Free Electron Laser: the use of an additional aperiodic capping layer on top of the structure combines the high reflectance with filter properties useful in rejecting the fundamental harmonic when the goal is to select the third FEL harmonic. ©2012 Optical Society of America.File in questo prodotto:
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