A real-time optical monitoring of coated thin films is being installed in a large coating machine. An optical system and a coating simulation software were developped, predicting the success rate of the deposition.
Broadband optical monitoring of optical thin films in large ion-beam sputtering machine
Cagnoli G.
2016
Abstract
A real-time optical monitoring of coated thin films is being installed in a large coating machine. An optical system and a coating simulation software were developped, predicting the success rate of the deposition.
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