We demonstrate an innovative approach to fabricating scalable VCSEL arrays for high-pulsed-power applications. The VCSEL arrays consist of tightly-packed, small-diameter mesas that are planarized and passivated with SU-8 resin, and connected by a large-area top transparent electrode made of indium tin oxide. Peak pulsed output power exceeding 100 kW/cm2 of active area was achieved in arrays with very smoothly etched and passivated sidewalls, without the need of oxide aperture formation.
Scalable High Pulsed Power VCSEL Arrays with Transparent Top Electrodes
Grenci G.;
2020
Abstract
We demonstrate an innovative approach to fabricating scalable VCSEL arrays for high-pulsed-power applications. The VCSEL arrays consist of tightly-packed, small-diameter mesas that are planarized and passivated with SU-8 resin, and connected by a large-area top transparent electrode made of indium tin oxide. Peak pulsed output power exceeding 100 kW/cm2 of active area was achieved in arrays with very smoothly etched and passivated sidewalls, without the need of oxide aperture formation.
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