Dielectric breakdown of the insulator between suspended membrane and actuation layer under anchorages can lead to a new stiction mechanism on electrostatically actuated RF-MEMS switches. Actuator current is investigated as an indicator of stiction issues and charge trapping phenomena. A design guide-line to improve RFMEMS switches reliability is also furnished

Stiction Induced by Dielectric Breakdown on rf-MEMS Switches

TAZZOLI, AUGUSTO;AUTIZI, ENRICO;PERETTI, VANNI;MENEGHESSO, GAUDENZIO
2008

Abstract

Dielectric breakdown of the insulator between suspended membrane and actuation layer under anchorages can lead to a new stiction mechanism on electrostatically actuated RF-MEMS switches. Actuator current is investigated as an indicator of stiction issues and charge trapping phenomena. A design guide-line to improve RFMEMS switches reliability is also furnished
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11577/2434527
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