The adoption of ESD events to systematically induce micro-welding formation on ohmic RF-MEMS switches is proposed. The established procedure for accelerated testing was verified with success on electrostatically actuated micro-machined switches having different topologies, and it was used to assess the efficiency of a heat-based active restoring mechanism.
A Positive Exploitation of ESD Events: Micro-welding Induction on Ohmic MEMS Contacts
TAZZOLI, AUGUSTO;MENEGHESSO, GAUDENZIO
2011
Abstract
The adoption of ESD events to systematically induce micro-welding formation on ohmic RF-MEMS switches is proposed. The established procedure for accelerated testing was verified with success on electrostatically actuated micro-machined switches having different topologies, and it was used to assess the efficiency of a heat-based active restoring mechanism.File in questo prodotto:
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