Origin of hole-like peaks in current deep level transient spectroscopy of n-channel AlGaAs/GaAs heterostructure field-effect transistors

The features of current deep level transient spectroscopy (I-DLTS) spectra are investigated in AlGaAs/GaAs heterostructure field-effect transistors both through experiments and two-dimensional numerical device simulations. Differently from electron traps located in the n-type semiconductor bulk, which can only be detected in emission-mode by I-DLTS, deep levels located at the ungated device surface are shown to be revealed both in emission and capture transients by I-DLTS. Experimental and simulation results indicate that this behavior originates from inherent physical properties of surface deep levels interacting with holes attracted at the ungated surface by the negative charge associated with ionized traps. (C) 2003 American Institute of Physics.