1.8-MeV proton irradiation to a fluence of 1014/cm2 does not significantly affect the resistance or low-frequency noise of copper or ruthenium resistors fabricated via modern microelectronic fabrication techniques used to form metal lines. The room-temperature noise of these Cu and Ru resistors is surprisingly similar to that of Cu and Pt metal lines and wires fabricated using late-1970s nanofabrication techniques; however, measurements of the temperature dependence of the noise show that the defect kinetics are quite different among the various materials. A large increase in the noise magnitude observed above 200 K in Cu but not in Ru is consistent with the superior resistance to electromigration that Ru lines have shown, relative to Cu.
Low-frequency Noise and Defects in Copper and Ruthenium Resistors
Bonaldo S.;
2019
Abstract
1.8-MeV proton irradiation to a fluence of 1014/cm2 does not significantly affect the resistance or low-frequency noise of copper or ruthenium resistors fabricated via modern microelectronic fabrication techniques used to form metal lines. The room-temperature noise of these Cu and Ru resistors is surprisingly similar to that of Cu and Pt metal lines and wires fabricated using late-1970s nanofabrication techniques; however, measurements of the temperature dependence of the noise show that the defect kinetics are quite different among the various materials. A large increase in the noise magnitude observed above 200 K in Cu but not in Ru is consistent with the superior resistance to electromigration that Ru lines have shown, relative to Cu.Pubblicazioni consigliate
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