The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to φ=4.4×10-7. © 2005 Elsevier B.V. All rights reserved.
Mechanical dissipation in silicon flexures
Cagnoli G.;
2006
Abstract
The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 μm thick 〈110〉 single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to φ=4.4×10-7. © 2005 Elsevier B.V. All rights reserved.
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