The influence of continuous actuation stress on the reliability of dielectric-less ohmic RF-MEMS cantilever-based switches was investigated in this work. Comparing different designs, the changing of the main electrical parameters during the stress were attributed to oxide-around-actuator charging phenomena, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed.

Impact of Continuous Actuation on the Reliability of Dielectric-less Ohmic RF-MEMS Switches

TAZZOLI, AUGUSTO;AUTIZI, ENRICO;BARBATO, MARCO;MENEGHESSO, GAUDENZIO
2009

Abstract

The influence of continuous actuation stress on the reliability of dielectric-less ohmic RF-MEMS cantilever-based switches was investigated in this work. Comparing different designs, the changing of the main electrical parameters during the stress were attributed to oxide-around-actuator charging phenomena, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11577/2373366
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