The evolution of the main electrical parameters of dielectric-less ohmic RF-MEMS cantilever-based switches during continuous actuation stress was investigated in this work. Thanks to different designs, the main electrical parameters changes were attributed to a charging phenomena of the oxide over the substrate near the polysilicon actuator, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed. Furthermore, the breakdown occurrence was also investigated, supported by both emission microscope and optical images.
Evolution of Electrical Parameters of Dielectric-less Ohmic RF-MEMS Switches during Continuous Actuation Stress
TAZZOLI, AUGUSTO;AUTIZI, ENRICO;BARBATO, MARCO;MENEGHESSO, GAUDENZIO;
2009
Abstract
The evolution of the main electrical parameters of dielectric-less ohmic RF-MEMS cantilever-based switches during continuous actuation stress was investigated in this work. Thanks to different designs, the main electrical parameters changes were attributed to a charging phenomena of the oxide over the substrate near the polysilicon actuator, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed. Furthermore, the breakdown occurrence was also investigated, supported by both emission microscope and optical images.File in questo prodotto:
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