The influence of the bias signal waveform on the electro-mechanical dynamic response of ohmic RF-MEMS switches is here investigated. Laser Doppler Vibrometer and electrical measurements were performed to characterize the actuation time, as well as bounces occurrences and reliability to cycling stress. A practical solution to limit bounces without compromise the actuation time is also presented.

Electro-Mechanical Characterization of the Dynamic Behavior of Ohmic RF MEMS Switches

TAZZOLI, AUGUSTO;BARBATO, MARCO;MENEGHESSO, GAUDENZIO
2010

Abstract

The influence of the bias signal waveform on the electro-mechanical dynamic response of ohmic RF-MEMS switches is here investigated. Laser Doppler Vibrometer and electrical measurements were performed to characterize the actuation time, as well as bounces occurrences and reliability to cycling stress. A practical solution to limit bounces without compromise the actuation time is also presented.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11577/2419839
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