The influence of the bias signal waveform on the electro-mechanical dynamic response of ohmic RF-MEMS switches is here investigated. Laser Doppler Vibrometer and electrical measurements were performed to characterize the actuation time, as well as bounces occurrences and reliability to cycling stress. A practical solution to limit bounces without compromise the actuation time is also presented.
Electro-Mechanical Characterization of the Dynamic Behavior of Ohmic RF MEMS Switches
TAZZOLI, AUGUSTO;BARBATO, MARCO;MENEGHESSO, GAUDENZIO
2010
Abstract
The influence of the bias signal waveform on the electro-mechanical dynamic response of ohmic RF-MEMS switches is here investigated. Laser Doppler Vibrometer and electrical measurements were performed to characterize the actuation time, as well as bounces occurrences and reliability to cycling stress. A practical solution to limit bounces without compromise the actuation time is also presented.
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